纳米金属氧化物气敏薄膜厚度效应的实验规律和理论  

Nano-Film Thickness Effect of Metal Oxides and the Correlation Theory

作　　者：袁庆华[1] 李蕾[1] 刘文利[1] 李建明[1] 裘南畹[1] 

机构地区：[1]山东大学物理和微电子学院,山东济南250061

出　　处：《实验室研究与探索》2005年第11期22-25,共4页Research and Exploration In Laboratory

摘　　要：给出了动态厚度效应特征时间的公式,灵敏度Sn与膜厚l的关系和存在最佳膜厚的特征,电导激活能随膜厚变化的特征。提出了发展气敏机理的扩散反应功能概念;提出了在纳米气敏晶粒中引入介观效应概念和修正Fermi统计的要求。The dynamical thickness effect-formula of characteristic time, the relation between sensitirity Sn and film thickness, the existence optimum film thickness; the characteristics of conductance activity energy that varies with film thickness were given. The development of diffusion reaction function in the gas sensing mechanism and the mesoscopic idea, the reforming Fermi statistic formula in the nano-gas sensing crystals were proposed.

关 键 词：厚度效应 特征时间 介观效应 

分 类 号：O488[理学—固体物理]