用双桥法减小压阻型传感器的温度漂移  

Compensation Method of Temperature Drift in Pressure Sensor Using Double Wheatstone-bridge Method

作　　者：鲁百佐[1] 刘志存[1] 

机构地区：[1]陕西师范大学物理学与信息技术学院,陕西西安710062

出　　处：《物理测试》2005年第6期60-62,共3页Physics Examination and Testing

摘　　要：论述了温度对压力传感器输出灵敏度的影响,为了减小传感器输出的温度漂移,利用双惠斯登电桥方法进行补偿,在300～373 K的温度范围内对传感器进行了测试.结果表明,采用双桥法补偿后,传感器输出的温度漂移可以降低70%以上.The effect of temperature on the output sensitivity of the piezo-resistive pressure sensor was discussed. In order to reduce the temperature drift of output for the piezo-resistive pressure sensor, the double Wheatstonebridge method is used to test the sensor with the temperature controlled at the range of 300-373 K. The results indicate that the temperature drift of the sensor output can be lowered by over 70%.

关 键 词：压力传感器 双桥法 温度漂移 补偿 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]