α粒子能损法测量薄膜厚度的准确性和灵敏度  

Accuracy and Sensitivity of Film Thickness Measurement by Using α-Particle Energy Loss Method

作　　者：徐家云[1] 白立新[1] 吴卫东[2] 吴丽萍[1] 周厚全[1] 

机构地区：[1]四川大学物理科学与技术学院,四川成都610064 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《原子能科学技术》2005年第6期495-497,共3页Atomic Energy Science and Technology

基　　金：高温高密度等粒子物理国家重点实验室基金资助项目(9035)

摘　　要：采用分层计算方法分析用α粒子能损法测量薄膜厚度的准确性与分层层数的关系。此关系表明,采用分层计算可使准确性提高30%。另外,分析了膜厚测量的灵敏度随α粒子能量或随薄膜厚度的变化关系,并根据这一关系提出了提高膜厚测量灵敏度的方法。The film that its mass thickness was measured by α-particle energy loss method was regarded as constitute of many layers. Each layer thickness was calculated. The total film thickness was obtained by summing thickness of every layer. It is shown that this dividing layer computing method can increase the measurement accuracy by 30% for α-particles from ^241Am. It is also seen that the sensitivity of thickness measurement with α-particle can he improved by lowering appropriately the energy of α-particle.

关 键 词：Α粒子 能损法 能量损失率 准确性 灵敏度 

分 类 号：O571.33[理学—粒子物理与原子核物理]