不同覆盖层GeSi波导的光场分析  

Optical Field Analysis of GeSi Waveguide on Different Covers

作　　者：李国正[1] 李代宗[1] 万建军[1] 

机构地区：[1]西安交通大学微电子系

出　　处：《半导体杂志》1996年第3期1-5,共5页

摘　　要：利用计算机求解有效折射率的方法，对两种脊形波导进行分析。结果表明。A method for calcaluting the effective refractive index and analysing the optical field of waveguide is given.For the same parameters,the rib-waveguid covered by Si on the rib and by SiO 2 on the remains limits light more effective than that covered by SiO 2 on the whole surface.

关 键 词：光波导 光场 集成光学 不同覆盖层 

分 类 号：TN252[电子电信—物理电子学]