无阀压电微泵的动态特性研究  

The Study on the Dynamic Characteristic of the Valveless Piezoelectric Micropump

作　　者：赵强[1] 崔大付[1] 王利[1] 王海宁[1] 刘长春[1] 

机构地区：[1]中国科学院电子学研究所传感技术与科学国家重点实验室,北京100080

出　　处：《压电与声光》2005年第6期631-633,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(20299032;60341005)

摘　　要：微泵作为微流控系统中的核心控制元件已成为MEMS研究的热点,现主要研究了无阀式压电微泵的工作原理及其动态工作特性。实验表明,无阀压电微泵的流速随频率呈抛物线关系变化,最佳工作频率为1 250Hz。在频率固定时,微泵流速随驱动电压的升高而增加。泵膜的厚度对于微泵的性能影响很大,相同条件下,较薄的泵膜具有更高的流速,且泵膜越薄,其性能对于频率的变化越敏感。电压为50 V时,微泵最大流量可达1.695μL/min。总体看来,无阀压电微泵结构简单,驱动电压较低,性能稳定可靠。As the key component of the Micro-fluidic System, Micropump has become more popular, in this paper, we mainly studied the principle and dynamic characteristic of the valveless piezoelectric micro-pump. The relationship between liquid flow rate and working frequency is accorded with curve of parabola. And the optimization frequency is 1250 Hz. For a fixed frequency, liquid flow rate increase as the voltage increase. Data also shows that the performance of the micropump is greatly affected by the thickness of the pump membrane. At the same condition, the micropump with thinner pump membrane shows better performance, and is more sensitive to the changes of driving frequency. When driving Voltage is 50 V, the maximum liquid flow rate of the micropump is 1. 695/μL/min. Generally speaking, the valveless piezoelectric micro-pump is simple structured, and the driving voltage is low, while the performance is stable.

关 键 词：微泵 压电 无阀 

分 类 号：TH137[机械工程—机械制造及自动化]