微细游离磨粒借助流体动压力实现的超精密加工技术  

Ultra-precision machining technology in fine loose abrasive using fluid hydrodynamic pressure

作　　者：李长河[1] 修世超[1] 蔡光起[1] 

机构地区：[1]东北大学机械工程与自动化学院

出　　处：《机械设计与制造》2005年第12期105-107,共3页Machinery Design & Manufacture

基　　金：国家自然科学基金项目(50475052);教育部博士点专项基金项目(20040145001)

摘　　要：精密加工是先进制造方法的重要组成部分,利用微细游离磨粒进行陶瓷、玻璃、半导体等光学零件的超精密加工,不仅可获得高的表面质量,微米级的形状精度和纳米级表面粗糙度值,而且还可得到无加工变质层超精密加工表面。这里主要论述了流体动压力实现的条件及动压浮起平面研磨、浮动抛光、弹性发射加工以及砂轮约束磨粒喷射加工等微细磨粒借助于流体动压力实现超精密加工技术。Super- precision machining is one of the important technology of advanced manufacture. Fine loose abrasives were invariably used in the optical components such as advanced ceramics, glass and semiconductors super- precision machining, not only may require high surface quality, micrometers form accuracies and nanometers roughness values, but also can require free subsurface and surface damage finishing components in order to attain higher performances. This paper focuses on investigating fluid hydrodynamic pressure achieved conditions. At the same time, fluid hydrodynamic pressure surface polishing machining technology such as float polishing, elastic emission machining and abrasive jet precision finishing machining with grinding wheel restrict using fluid hydrodynamic film achieve super - precision machining techniques were analyzed.

关 键 词：微细游离磨粒 流体动压力 超精密加工 

分 类 号：TH161.14[机械工程—机械制造及自动化]