Sol-gel法制备NiZnCu铁氧体性能的研究  

NiZnCu ferrite prepared by sol-gel process

作　　者：刘锋[1] 杨晨[2] 任天令[2] 刘理天[2] 于军[1] 白洋[3] 

机构地区：[1]华中科技大学电子科学与技术系,湖北武汉430074 [2]清华大学微电子所,北京100084 [3]清华大学材料学院,北京100084

出　　处：《功能材料》2005年第12期1849-1851,1858,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(90407023)

摘　　要：采用溶胶-凝胶自燃法制备了Ni0.4Zn0.4Cu0.2Fe2O4铁氧体,使用HP4191A阻抗分析仪测试了材料高频磁谱;结合快速热处理(RTP)工艺制备了Ni0.4Zn0.4Cu0.2Fe2O4磁性薄膜,使用AFM、XRD、AGM系统地研究了制备工艺对薄膜样品表面形貌、晶相结构和准静态磁性的影响。测试结果表明:Ni0.4Zn0.4Cu0.2Fe2O4可适用于射频领域,截止频率fr在1GHz以上,1GHz处起始磁导率μ′=5.3,μ″=3.45;sol-gel法制备磁性薄膜最佳晶化温度为600℃左右,在此温度下制备的薄膜晶粒大小为13nm左右,饱和磁化强度Ms=2.29×105A/m,矫顽力Hc=1.24×103A/m。In this paper, sol-gel method was applied to fabricate Ni0.4 Zn0.4 Cu0.2 Fe2O4 ferrite and HP4191A impedance analyzer was used to test the high-frequency permeability spectra of the samples. Combined with rapid thermal processing, Ni0.4 Zn0.4 Cu0.2 Fe2O4 thin-films are fabricated, and AFM, XRD and AGM are used to research the impact of fabrication process on the surface topology, crystal structure and quasi-static magnetic performance of the thin-films. The results demonstrate that Ni0.4 Zn0.4 Cu0.2 Fe2O4 was suitable for RF application, of which the cut-off frequency was above 1. 0GHz. At 1GHz, the initial permeability was μ＇ = 5.3 and 3.45. The optimized temperature of crystallization of the thin-film was near 600℃, at which the fabricated grain size was about 13nm, the saturate magnetization Ms was 2.29×10^5A/m, and the coercivity Hc was 1.24×10^3 A/m.

关 键 词：溶胶-凝胶法 NIZNCU铁氧体 高频磁谱 准静态磁性能 

分 类 号：TM277[一般工业技术—材料科学与工程]