FTO/ITO复层导电薄膜的研究  

Study on FTO/ITO composite conducting films

作　　者：胡志强[1] 张晨宁[1] 丘鹏[1] 刘俐宏[1] 奥谷昌之[2] 金子正治[2] 

机构地区：[1]大连轻工业学院材料系,辽宁大连116034 [2]静冈大学工学部物资工学科

出　　处：《功能材料》2005年第12期1886-1888,共3页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50376007);辽宁省教育厅资助项目(202073422)

摘　　要：采用溶胶凝胶法与溶液水解法分别制备ITO、FTO以及FTO/ITO复层导电膜,利用分光光度仪测量在可见光范围内的透光率,用四探针法精确测量薄膜的电阻率,通过扫描电镜观测薄膜的表面形态,微观颗粒形貌以及薄膜的厚度。实验表明,用SnCl4.5H2OI、n(NO3)3.4.5H2O、NH4F作为主要原料,通过溶胶凝胶法和溶液水解法可制备出低电阻率,高透光性的FTO/ITO复合导电薄膜。ITO,FTO and FTO/ITO composite conducting trims were preparecl respectively Dy sol-gel and somtion hydrolyzing methods,transmittance of films were measured in the range of visible light by spectrophotometer;electrical resistance rate of films were determined by four probes methods;surface morphology of films,size of microcosmic particle and thickness of films were observed by SEM. Experiment show. FTO/ITO composite conducting films with low resistivity, high optical transmittance can be obtained through using SnCl4·5H2O,In （NO3）3·4.5H2O,NH4F as raw material by sol-gel and solution hydrolyzing methods.

关 键 词：溶胶-凝胶法 FTO/ITO复层导电膜 电阻率 透光率 

分 类 号：TM240.51[一般工业技术—材料科学与工程]