Preparation and Characterization of TiO2/Ormosil Planar Waveguide with Low Attenuation  

作　　者：王宝玲 胡丽丽 李慧琴 

机构地区：[1]Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, P.R. China [2]Instrumental Analysis Center, Shanghai Jiaotong University, Shanghai 200030, P.R. China

出　　处：《Journal of Shanghai University(English Edition)》2005年第6期489-492,共4页上海大学学报（英文版）

摘　　要：TiO2/ ormosil planar waveguide was prepared by sol-gel method at low thermal treatment temperature （ 〈 200 ℃）. Scanning electron microscope, FT-IR spectrometer, spectrophotometer, atomic force microscopy, thermal analyzer, and dark m-line spectroscopy were used with the method of scattering-detection to investigate optical and structural properties. High optical quality waveguide film was obtained. The propagation loss of film was 0.569 dB/cm at a wavelength of 632.8 nm.TiO2/ ormosil planar waveguide was prepared by sol-gel method at low thermal treatment temperature （ 〈 200 ℃）. Scanning electron microscope, FT-IR spectrometer, spectrophotometer, atomic force microscopy, thermal analyzer, and dark m-line spectroscopy were used with the method of scattering-detection to investigate optical and structural properties. High optical quality waveguide film was obtained. The propagation loss of film was 0.569 dB/cm at a wavelength of 632.8 nm.

关 键 词：sol-gel process ORMOSIL planar waveguide low attenuation optical property. 

分 类 号：TN252[电子电信—物理电子学]