沃拉斯顿棱镜增透膜的研制  

Development of the Wollaston Prism Antireflection Film

作　　者：赵培[1] 吴福全[1] 郝殿中[1] 王仍 任树锋[1] 

机构地区：[1]曲阜师范大学激光研究所,山东曲阜273165 [2]曲阜师范大学物理工程学院,山东曲阜273165

出　　处：《中国激光》2005年第12期1703-1705,共3页Chinese Journal of Lasers

摘　　要：为了减小沃拉斯顿(Wollaston)棱镜端面反射以提高棱镜的透过率,研究了沃拉斯顿棱镜增透膜的设计和蒸镀工艺。针对制作棱镜的冰洲石晶体和许多膜料之间的附着力较差,膜层不牢固,以及该棱镜中o,e光对应的基体折射率相差较大等问题,在膜系设计时要兼顾两束线偏振光同时增透的特点,在多次工艺实验摸索出合适的膜料及蒸镀条件的基础上,利用矢量法分析了内层膜的作用并总结了设计方法,具体设计了沃拉斯顿棱镜窄带增透膜,最后根据设计的膜系蒸镀制备了增透膜。利用岛津UV3101分光光度计测量了膜系的反射光谱,结果表明,o光的端面剩余反射减小到0.21%,e光的端面剩余反射减小到0.22%,并且膜层牢固。The antireflection （AR） thin film can reduce the reflectance of the end surface of the Wollaston prism, which can enhance the transmissivity of the prism. When the AR film is designed, it should be considered the big difference of respective refractive index of o light and e light and the poor adhensive power between the iceland crystal which be used to made the prism and many kinds of film material. Based on the analyzing of the role of the inner layer film by using vector method, a Wollaston prism AR film was evaporated and designed. The reflective spectrum was tested using the UV3101 specto photometer. The result showed that the residue reflectances were 0.21% and 0.22% for o and e light, respectively, and the adhesive power of the film was improved.

关 键 词：薄膜 沃托斯顿棱镜 增透膜 附着力 矢量法 

分 类 号：O484.1[理学—固体物理]