彩色等效灰度掩模制作方法研究  

Research of the Fabrication Method for Color-equivalent-gray Masks

作　　者：罗宁宁[1] 高益庆[1] 谌廷政[1] 漆新民[1] 朱小进[1] 陈劲松[1] 

机构地区：[1]南昌航空工业学院测控系,南昌330034

出　　处：《光子学报》2005年第12期1778-1782,共5页Acta Photonica Sinica

基　　金：航空科学基金(04I56010);江西省自然科学基金(0412027)资助项目

摘　　要：提出了一种利用彩色等效灰度理论设计掩模的新方法———数据库法.通过选取不同RGB值组合成特定颜色,由彩色胶片输出仪输出这些颜色组成的彩色掩模,获得的彩色胶片掩模用来线性调制曝光量,从而实现二元光学元件台阶深度的线性化.给出了理论计算和16阶菲涅耳透镜的实验结果,证明了数据库方法设计掩模的可行性.该方法的提出为灰度扩展提供了新途径.The database method, a new mask design method is presented, which is based on the color- equivalent-gray theory. Choosing different values of red, green and blue to form different colors, masks composed of these colors can be obtained by color film recorder. The output mask is used to linearly modulate the exposure. Consequently,the linearization of steps can be realized. The theoretical calculation and the experimental result of sixteen-step Fresnel are given. As a result, the database method is feasible. It provides a new approach for the gray expansion and has some referential meaning for the fabrication of DOEs.

关 键 词：衍射光学 彩色等效灰度理论 彩色掩模 彩色胶片输出仪 

分 类 号：TN305.7[电子电信—物理电子学]