基于超磁致伸缩和压电陶瓷的XY超精密定位工作台  

XY Precise Positioning Work-Stage Based on Giant Magneto-Strictive and Piezo-Electric Ceramics

作　　者：李翠红[1] 孟永钢[1] 田煜[1] 温诗铸[1] 

机构地区：[1]清华大学摩擦学国家重点试验室,北京100084

出　　处：《纳米技术与精密工程》2005年第4期257-261,共5页Nanotechnology and Precision Engineering

基　　金：国家"863"计划资助项目(2002AA23240).

摘　　要：基于蠕动运动原理,利用超磁致伸缩材料作为驱动元件研制了直线式蠕动进给机构,同时还研制了压电陶瓷-柔性框架式蠕动进给机构．后者放置于前者之上,构成了具有毫米级行程、纳米级定位精度的XY二维精密定位工作台．在计算机控制下,对XY向位移分别进行了闭环反馈控制并测试了它们的步进性能．试验结果表明,工作台在X和Y方向上可以稳定地蠕动步进或后退,X向蠕动机构定位精度为±15 nm,Y向蠕动机构定位精度为±50 nm．A linear inchworm mechanism was developed with a magneto-strictive actuator, another inchworm mechanism was composed of a flexi-frame and piezo-electric ceramics. The former was placed under the latter to form an XY work-stage with millimeters travel range and nanometers positioning precision in two working directions. Under the closed-loop control of PC, the step performances of the work-stage were tested. The results indicate that the stage is able to step forward and backward stably, and the positioning precision of X direction is ± 15 nm and the one of Y direction is ± 50 nm.

关 键 词：超磁致伸缩材料 压电陶瓷 蠕动 工作台 

分 类 号：TH703[机械工程—仪器科学与技术]