基于隧道效应的纳米级振动检测及补偿  

Nano-Level Vibration Test and Compensation Based on Tunneling Effect

作　　者：李梦超[1] 傅星[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《纳米技术与精密工程》2005年第4期299-302,共4页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助(60372006)

摘　　要：微振动是提高纳米测量精度的主要障碍,为了减小微振动在STM测量中的影响,需要对微振动进行隔离和检测．因此,抗振、隔振及振动补偿技术成为了纳米测量领域的一大分支．设计了基于隧道效应的纳米级振动传感器,该传感器具有很高的灵敏度和分辨力,并用设计的振动传感器进行了纳米级振动检测试验．在隧道状态下, 观察隧道间隙对外界微振动的响应情况,并用测量结果实时对STM测量进行补偿．结果表明,基于隧道效应的测振传感器具有很好的响应特性和良好的幅频特性,并且可以进行STM的振动补偿．The micro vibration has already become one of the main obstacles for improving the nano measuring accuracy. To reduce the influence of micro vibration in the measurement, the technique of anti-vibration, vibration isolation, vibration compensation turns into a big branch in nano measurement field. With high resolution and sensitivity, the nano-level vibration sensor based on tunneling effect is designed and vibration detection experiments are carried out. In the tunneling state, the response of the tunneling gap to external micro vibration is recorded, and the measurement results are used to compensate STM in real time. The results demonstrate the sensor has good response and well amplitude and frequency characters. Futhermore, it can make compensations for STM to improve the measurement precision.

关 键 词：纳米级振动传感器 扫描隧道显微镜(STM) 振动检测 隧道效应 

分 类 号：TH703[机械工程—仪器科学与技术]