MEMS器件虚拟运行中运动规律求解器的设计与实现  

Design and realization of kinematics solver in MEMS virtual operation

作　　者：谭宜勇[1] 赵新[1] 卢桂章[1] 

机构地区：[1]南开大学机器人与信息自动化研究所,天津,300071

出　　处：《高技术通讯》2005年第12期24-29,共6页Chinese High Technology Letters

基　　金：新材料领域项目，国家重点基础研究发展计划(973计划)，中国科学院资助项目，教育部高校骨干教师资助计划，Tianjin Natural Sci. Found

摘　　要：针对虚拟运行(在器件动态模型的基础上对MEMS器件运动性能进行评测的设计工具,其作用在于建立MEMS设计参数与器件运行之间的直接联系)中运动规律的联立、求解和实时仿真等问题,分析了几种典型MEMS器件的动态模型,提出了运动规律求解器的设计原理和体系结构,其中包括三项关键技术:物理运动规律在部件库系统中的形式化表示,物理问题自动求解的推理算法,以及离线编译的优化技术.最后,设计和实现了运动规律求解器原型系统,并在该系统中测试了微泵的虚拟运行,达到了通过修改阀片设计参数和膜片驱动参数实时观察虚拟运行中状态相应变化的目标,即在微泵的设计参数与其运行之间建立了直接的关联关系.Virtual Operation is a design tool for motion function evaluation and test of MEMS devices based on dynamic models, which aims at building the direct relationship between the parameter design and the devices＇ simulation. According to the problems of solving the MEMS devices＇ kinematics simultaneous equations and real-time simulation in virtual operation, several typical dynamic models of MEMS devices are analyzed, and then a kinematics solver is put forward, which includes three key techniques： the formal description of physical kinematics in part-lib based system, the reasoning arithmetic of physics problem solver, and the optimization of of/line-compiled code. Finally, a realization of kinematics solver is presented. During test and verification of the micro-pump＇ s virtual operation, when the structure parameters of microvalve and the drive parameters of membrane were modified, the view of their states varied correctly, which means a relation between the micro-pump＇s design parameters and the virtual operation has been built successfully.

关 键 词：微电子机械系统(MEMs) 虚拟运行 运动规律 自动求解 编译 

分 类 号：TP391.72[自动化与计算机技术—计算机应用技术] TH-39[自动化与计算机技术—计算机科学与技术]