针尖扫描原子力显微镜的光点跟踪设计  

Design of Optical Tracking for Scanned-Cantilever Atomic Force Microscope

作　　者：杨金涛[1] 徐文东[1] 

机构地区：[1]中国科学院上海光学精密机械研究所先进激光技术与应用系统实验室,上海201800

出　　处：《中国激光》2006年第1期26-30,共5页Chinese Journal of Lasers

基　　金：上海市科委纳米专项(0359NM003)资助课题

摘　　要：提出了一种用于针尖扫描原子力显微镜(AFM)的光点跟踪设计方案,结构简单,容易实现。设计方案对扫描器的负载能力要求不高,而且能使原子力显微镜实现较大范围的针尖扫描。实验结果表明,采用此光点跟踪设计方案的针尖扫描原子力显微镜能实现最大100μm×100μm范围的扫描,z方向上的误差最大1 nm,能很好地满足大样品扫描的需要。A design of optical tracking that can be applied to scanned-cantilever atomic force microscope （AFM） is proposed. The configuration of the design is very simple and can be actualized easily. This design not only can realize large range scanning of AFM, but also does not request the high load ability of the scanner. The experimental results show that the scanned-cantilever AFM adopting the optical tracking technique can realize maxium 100 μm × 100μm scanning area, and the error in z direction is no more than 1 nm, which can meet the requirements of large sample scanning.

关 键 词：仪器 原子力显微镜 针尖扫描 光点跟踪 

分 类 号：TH742.9[机械工程—光学工程]