软印刷技术  

Soft Lithography

作　　者：赵小力[1] 董申[1] 于海涛[2] 

机构地区：[1]哈尔滨工业大学精密工程研究所,哈尔滨150001 [2]中国电子科技集团公司第四十九所,哈尔滨150001

出　　处：《微纳电子技术》2006年第1期55-63,共9页Micronanoelectronic Technology

摘　　要：软印刷技术是基于弹性体印章/模具来转移图形结构的微纳加工技术。详细介绍了软印刷技术中转移图形结构的多种方式,并探讨软印刷技术在微纳电子学、光学、传感器、生物等领域的广泛应用。对软印刷技术的弹性体印章/模具制备、聚二甲基硅氧烷的属性、理论研究等进行了探讨。Soft lithography is a micro/nano-fabrication technology, which transfers patterns based on elastomeric stamps or molds. The different ways for patterns transferring by soft lithography were introduced. And it can be used in wide fields, such as micro/nano-electronics, optics, sensor, biology and so on. In addition, the preparation of elastomeric stamp or mold, and the attribution and theory of PDMS were discussed.

关 键 词：软印刷技术 弹性体 聚二甲基硅氧烷 

分 类 号：TN405[电子电信—微电子学与固体电子学]