飞秒激光双光子成型点弹性模量测量与分析  

Measurment and Analysis of Elastic Modulus of Single Voxels by Femo-second Two-photon Photopolymerization

作　　者：苏亚辉[1] 郭锐[1] 董磊[2] 郑志军[3] 陈宇航[1] 肖诗洲[1] 黄文浩[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230026 [2]中国科学技术大学纳米结构与物理研究室,合肥230022 [3]中国科学技术大学材料力学行为和材料设计研究实验室,合肥230026

出　　处：《微细加工技术》2005年第4期31-36,共6页Microfabrication Technology

基　　金：国家自然科学基金资助项目(5027514050335050)

摘　　要：借助原子力显微镜,选用无针尖探针测量了材料为SCR500的成型点的力学性能,由于成型点的形状为椭球,根据测量方法建立了球-平面探针接触的Johnson-Kendall-Roberts弹性接触模型,考虑到成型点剩余部分形变对结果分析的影响,推算出单个成型点的弹性模量。测量和分析表明,双光子固化成型点的弹性模量大约为宏观材料的1/10。Using a tipless cantilever, the mechanical properties of SCR500 voxels are measured by AFM.Aeeording to the measuring conditions, the JKR theory is adopted in analyzing the elastic contact between flat tip and spherical voxel top. As voxel shape is ellipes, in calculation of individual voxels＇ elastic modulus, the effects of the rest part into account are taken. From experiments and theoretical analysis, the elastic modulus of individual voxels in sub-micrometer scale is about 10% of the elastic modulus of macro-scale samnle.

关 键 词：成型点 原子力显微镜 弹性模量 无针尖探针 力学模型 

分 类 号：TN24[电子电信—物理电子学]