多壁碳纳米管湿敏传感器的研究  

Research into Humidity Sensors Based on Multi-Wall Carbon Nanotubes

作　　者：陈文菊[1] 郭淼[1] 陈金霞[1] 潘敏[1] 陈裕泉[1] 

机构地区：[1]浙江大学生物医学工程系,杭州310027

出　　处：《传感技术学报》2005年第4期705-709,共5页Chinese Journal of Sensors and Actuators

基　　金：国家863计划项目资助;国家自然科学基金资助(30470461)

摘　　要：传感器的基底为Al板电化学氧化成Al2O3绝缘层模板,上面真空溅射了叉指金电极,在电极之间旋涂微量多壁碳纳米管的水悬浊液,干燥后作为敏感膜。室温下测试传感器暴露在不同湿度的电阻变化,发现吸附了H2O后传感器的导电能力降低,且下降的幅度与被测湿度有良好的梯度关系。同时该多壁碳纳米管再经缩合剂EDC修饰后旋涂于电极上形成的敏感膜对湿度呈指数级变化。对它们的湿敏响应的机理进行了一些初步的探讨。The humidity characteristics of the multi-wall carbon nanotube films was studied. A sensor based on multi-wall carbon nanotube was developed for humidity detection at room temperature. The electrical conductivity of the dried carbon nanotube film decreased when the electrode was exposed to higher relative humidity （RH） atmosphere. And there is a good and the RH. In addition, when Multi-wall carbon correlation between the increasing resistance amplitude modified with the coupling agent 1-（3-（dimethylamino） propyl）-3-ethyl-carbodiimide hydrochloride （EDC）, the reaction to different RH surrounding is remarkable. Their mechanism of humidity characteristics were discussed.

关 键 词：多壁碳纳米管 湿敏 相对湿度 饱和盐水溶液 碳二酰胺 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]