MEMS器件IP库及系统应用  

Systematic Application of IP Library of MEMS Devices

作　　者：殷刚毅[1] 

机构地区：[1]东南大学微电子中心MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2005年第4期886-889,共4页Chinese Journal of Sensors and Actuators

摘　　要：针对目前MEMS设计方法中系统分析不完善的现状,提出了将IP库单元应用于系统分析的方法。本文描述了已建立的MEMS微传感器件IP库单元的原型及库单元的结构和关键参数。以梳状微机械谐振器为例,使用SPICE语言调用已建立的IP库单元进行模拟分析,实现了MEMS器件和电路的系统模拟。To improve the system level analysis ability in design of MEMS, a new method that applys the IP library to analyze MEMS devices is presented. Some prototype of MEMS micro sensor, and library structure and key parameters of the built IP cell are introduced. Taking a comb resonator as example, using the SPICE language to transfer the IP library cell and carry on the simulation analysis, has been realiged systematic co-simulation of MEMS device and electric circuit.

关 键 词：VIEMS器件 系统分析 IP库 SPICE 

分 类 号：TN401[电子电信—微电子学与固体电子学]