锂磷氧氮(LiPON)薄膜的制备及应用进展  

Development of the preparation and application of LiPON thin film

作　　者：赵胜利[1] 文九巴[1] 樊丽梅[1] 秦启宗[2] 

机构地区：[1]河南科技大学材料科学与工程学院,河南洛阳471003 [2]复旦大学化学系,上海200433

出　　处：《电池》2005年第6期459-461,共3页Battery Bimonthly

基　　金：国家自然科学基金项目(20083001);河南科技大学人才科研基金项目(04015)

摘　　要：介绍了锂磷氧氮(LiPON)薄膜的结构与特性,综述了LiPON薄膜的制备方法以及应用情况,并就LiPON薄膜制备中出现的困难和以后的研究方向做了简单的评述。The structure and property of LiPON thin film were presented and the preparation methods and applications of LiPON thin film were summarized. The research trends and problems in preparing LiPON thin film were briefly mentioned.

关 键 词：锂磷氧氮(LiPON) 薄膜 制备 应用 

分 类 号：TM912[电气工程—电力电子与电力传动]