激光晶体炉上称重法自动直径控制(ADC)技术  

Research on the Laser Crystal Growth Furnace's Up-weighing Method ADC Technique

作　　者：董淑梅[1] 李言[2] 李留臣[1] 王庆[1] 楚波[1] 

机构地区：[1]西安理工大学晶体生长设备研究所,西安710048 [2]西安理工大学机械与精密仪器工程学院,西安710048

出　　处：《人工晶体学报》2005年第6期1141-1145,共5页Journal of Synthetic Crystals

摘　　要：自动直径控制(ADC)技术是直拉法晶体生长设备的一项动直径控制方法,并从理论上分析了上称重法自动直径控制(ADC)原理,着重介绍了在传统TDL-J50A及TDL-J60激光晶体炉上自主开发的上称重法自动直径控制系统的机械结构及控制系统.使用上称重法自动直径控制系统已成功地生长出φ51～76mmYAG晶体及φ51～76mm铌酸锂晶体,取得了良好的控制效果.Automatic diameter control （ADC） is a key technique for the CZ crystal growth equipment. In this paper, a kind of up-weighing ADC method for the laser crystal growth furnace is presented and its principle is analyzed in theory. And this system developed independently on the traditional TDL-J50A and TDL-J60 laser crystal growth furnace is mainly introduced as well as its mechanical structure and control system. Using this ADC system,Ф51 -76mm YAG crystal and Ф51 -76mm LiNbO3 crystal have been successfully grown, and have acquired a good effect.

关 键 词：激光晶体炉 自动直径控制 上称重法 

分 类 号：O78[理学—晶体学]