一种并行共焦显微镜的设计与研制  

Design and manufacture of a kind of parallel confocal microscopy

作　　者：高晓斌[1] 余晓芬[1] 

机构地区：[1]合肥工业大学仪器仪表学院,安徽合肥230009

出　　处：《光学仪器》2005年第6期72-75,共4页Optical Instruments

基　　金：国家自然科学基金资助项目(50175024);教育部科学技术研究重点项目(01103)

摘　　要：并行共焦显微镜是一种综合了光学、机械、电子、计算机及数字图像处理等技术,具有较高的横向和纵向分辨力的新颖三维表面无损检测仪器.为了保证其装配调节方便,在关键部件的结构设计上采用了微调结构,主要介绍了并行共焦显微镜的光学系统、物镜组设计、关键部件的微调结构设计及结构组成。The parallel confocal microscopy is one kind of modern 3-D surface measure instrument which is used optics, mechanism, electron, computer, digital image process technology. The sample is tested and non-destructive through it. Fine-tuning device is used in some key components in order to assemble and adjust easily. Construction. principle and design of object lenses of the parallel confocal microscopy are mainly presented in this paper.

关 键 词：并行共焦测量 表面检测 微调结构 

分 类 号：TN247[电子电信—物理电子学]