前驱体浓度对超声雾化热解法制备ZnO薄膜性能的影响  

Effects of Different Concentrations of Precursor Solution on the Property of ZnO Films Prepared by Ultrasonic Spray Pyrolysis Method

作　　者：周佳[1] 韩高荣[1] 李敏睿[1] 

机构地区：[1]浙江大学材化学院材料系硅材料国家重点实验室,杭州310027

出　　处：《材料导报》2006年第1期120-122,共3页Materials Reports

基　　金：国家高技术研究发展计划(863计划)资助项目(2001AA320202)

摘　　要：采用超声雾化技术,以醋酸锌水溶液为前驱体溶液,在加热的玻璃衬底上制备得到ZnO薄膜。研究了不同前驱体溶液浓度和不同加热温度条件下制得的ZnO薄膜的微观结构和光学性能。测试结果表明,ZnO薄膜为六角纤锌矿结构,在合适的条件下可以制备出沿(002)晶面取向生长的样品,具有优良的均匀性和致密性。同时在可见光区也表现出80％以上的高透过率。ZnO thin films were grown on the heated glass substrate by the ultrasonic spray pyrolysis method, zinc acetate solutions were used as the precursor material. The crystalline and microstructure of the thin films prepared through different concentrations of precursor solutions have been carefully analyzed. The results show that the ZnO thin films exhibit the hexagonal wurtzite polycrystalline structure. Samples that grown in suitable conditions have the dense smooth and homogenous structure and exhibit the preferential orientation of （002） to the substrate surface. And these films have a high visible transmittance of above 80%.

关 键 词：ZNO 超声雾化热解法 取向生长 

分 类 号：TN304.21[电子电信—物理电子学]