多弧离子镀制备硬质梯度薄膜技术  

Preparation of Gradient Hard Coatings by Multi-arc Ion Plating

作　　者：晏鲜梅[1] 熊惟皓[1] 郑立允[1] 周风云[1] 

机构地区：[1]华中科技大学模具技术国家重点实验室,武汉430074

出　　处：《材料导报》2006年第1期135-136,142,共3页Materials Reports

基　　金：国家自然科学基金(50074014)湖北省自然科学基金(2003ABA092)

摘　　要：介绍了多弧离子镀在金属陶瓷表面沉积硬质梯度薄膜的技术,用X射线衍射法对表面形成的薄膜进行了物相分析,并对材料的金相显微组织、显微硬度、抗弯强度以及膜与基体的结合力进行了测试和分析。结果表明:多弧离子镀处理能在金属陶瓷表面形成硬质梯度薄膜,膜与基体的结合力良好,表面硬度大大提高,而材料的抗弯强度却没有发生变化。A reasonable technology of preparation of gradient hard coatings by multi-arc ion plating is introduce＆ X-ray diffraction analysis is done to define the phase generated after multi-arc plating. It is found that pure TiN films appear on the substrate. Microstructure, microhardness, transverse rupture strength as well as the cohesion are measured. The results show that gradient hard coatings on cermet substrate and the cohesion are ideal. Surface hardness is improved, but the transverse rupture strength does not change.

关 键 词：多弧离子镀 金属陶瓷 梯度薄膜 TIN 

分 类 号：TB43[一般工业技术] TG174.444[金属学及工艺—金属表面处理]