纳米技术的研究现状与将来  

The Current Research and Future in Nanotechnology

作　　者：阎永志[1] 

机构地区：[1]四川压电与声光技术研究所

出　　处：《压电与声光》1996年第4期279-285,共7页Piezoelectrics & Acoustooptics

摘　　要：纳米科学技术将成为２１世纪最重要的高技术之一。纳米技术的最终目标是直接操纵单个原子和分子，制造量子功能器件，从而开拓人类崭新的生产生活模式。文章评述利用电子束、离子束的精细技术和ＳＴＭ原子操纵技术的研究现状，介绍原子层蚀刻，单层抗蚀剂自形成蚀刻，纳米自然蚀刻和电子束全息纳米蚀刻等高技术前沿动态，展望纳米技术的发展前景。Nanoscale science and technology will become one of the most important high technologies of 21 century.The final goal of nanoscale technology is to manufacture quantum functiondevices that possess special function from atoms or molecules directly. This will strikingly changehuman models of production and living conditions. The current research of nanometer machiningtechnology by electron beam and ion beam method and atomtechnology using STM are reviewed inthis paper.High technology fields on atom layer lithography,on self cambium lithography andnanometer lithography by electron beam holography method are introduced.The developing futurefor nanotechnology are prospected as well.

关 键 词：纳米蚀刻 STM原子工艺学 纳米器件 纳米技术 

分 类 号：TN4[电子电信—微电子学与固体电子学]