ERROR ANALYSIS OF 3D DETECTING SYSTEM BASED ON WHOLE-FIELD PARALLEL CONFOCAL MICROSCOPE  

作　　者：Wang Yonghong Yu Xiaofen 

机构地区：[1]School of Instrumentation,Hefei University of Technology, Hefei 230009, China

出　　处：《Chinese Journal of Mechanical Engineering》2005年第4期623-626,共4页中国机械工程学报（英文版）

基　　金：This project is supported by National Natural Science Foundation of China (No.50175024)Provincial Program for Young Teacher of Colleges and Universities of Anhui(No.2005jql019)Provincial Research Foundation of Key Laboratory of Anhui.

摘　　要：Compared with the traditional scanning confocal microscopy, the effect of various factors on characteristic in multi-beam parallel confocal system is discussed, the error factors in multi-beam parallel confocal system are analyzed. The factors influencing the characteristics of the multi-beam parallel confocal system are discussed. The construction and working principle of the non-scanning 3D detecting system is introduced, and some experiment results prove the effect of various factors on the detecting system.Compared with the traditional scanning confocal microscopy, the effect of various factors on characteristic in multi-beam parallel confocal system is discussed, the error factors in multi-beam parallel confocal system are analyzed. The factors influencing the characteristics of the multi-beam parallel confocal system are discussed. The construction and working principle of the non-scanning 3D detecting system is introduced, and some experiment results prove the effect of various factors on the detecting system.

关 键 词：3D profile Parallel detecting Confocal Microlens array 

分 类 号：TN16[电子电信—物理电子学]