TiNi基形状记忆合金薄膜研究进展  

Advances of Investigation on TiNi-based Shape Memory Alloy Films

作　　者：宁智华[1] 王治国[1] 傅永庆 祖小涛[1] 

机构地区：[1]成都电子科技大学应用物理系,610054 [2]Department of Engineering,University of Cambridge,Cambridge UK

出　　处：《材料导报》2006年第2期118-120,125,共4页Materials Reports

基　　金：国家自然科学基金(10175042);教育部新世纪优秀人才计划资助

摘　　要：Ti Ni基形状记忆合金薄膜除具有和体材料相同的形状记忆特性外,还因表面积大、散热能力好,改善了体材料响应速度较慢的缺点,在微电子机械系统领域是一种具有广阔应用前景的材料。综述了近年来Ti Ni基形状记忆合金薄膜研究现状,并对其应用进行了评述。The shape memory effect of TiNi-based shape memory alloy films is almost comparable to that of the bulk specimens. The shape memory alloy film also exhibits a rapid response time due to large ratio of surface area to volume.So TiNi-based alloy thin fihn is a promising candidate for micro electric mechanical system microacutation. This paper overviews the development and potential application of TiNi based shape memory alloy films.

关 键 词：TINI基形状记忆合金 薄膜 制备 微驱动器 

分 类 号：TG139.6[一般工业技术—材料科学与工程] TG113.12[金属学及工艺—合金]