一种基于光学倍乘原理的绝对距离干涉测量系统  

An absolute distance measurement system based on optical multiplication

作　　者：杨天博[1] 郭宏[1] 李达成[1] 

机构地区：[1]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《光学技术》2006年第1期39-41,46,共4页Optical Technique

摘　　要：介绍了一个基于光学倍乘原理的绝对距离干涉测量系统。系统包括两个干涉仪:采用半导体激光器作为光源的定位干涉仪和测量位移的外差干涉仪。介绍了光源的选择,系统的设计以及信号的采集和处理方案。采用这套绝对测量系统,可以实现长度为2m以内的绝对距离测量,定位精度可以达到±0.5μm。An optic interferometer system based on optical multiplication for measuring absolute distance was presented. The system consisted of two interferometers. One interferometers using laser diode was used to position the zero optical path difference point. The other which is a heterodyne interferometer was used to measure the displacement of the reference prism. The choice of the light source, system design, signal collection and processing method were discussed. With optical multiplication absolute distance measurement technique , the measurement of absolute distance up to 2 meter is achieved, with the positioning accuracy of ＋ 0.5μm.

关 键 词：光学倍乘 零光程差 绝对距离测量 相干性 

分 类 号：H741.1[语言文字]