脉冲激光诱导钛表面氮化的研究  

Investigation on Surface Nitridation of Titanium by Pulsed Laser

作　　者：金永吉[1] 邵天敏[1] 尹亮[1] 高学宁[1] 

机构地区：[1]清华大学摩擦学国家重点实验室,北京100084

出　　处：《材料工程》2006年第1期53-56,共4页Journal of Materials Engineering

基　　金：国家重点基础研究发展计划973项目(2002CB716201);国家自然科学基金项目(50475012)

摘　　要：介绍了在氮气气氛下，用脉冲激光照射钛表面实现钛的诱导氮化的实验结果。利用扫描电镜（SEM）、X射线衍射（XRD）和拉曼光谱对氮化表面进行了结构表征和性能分析。X射线衍射（XRD）结果显示氮化层的主要成分是α-Ti相和δ-TiN相，同时含有少量的α-Ti（N）固溶体。随着激光平均功率的增加，氮化层中δ-TiN相和α-Ti（N）固溶体含量逐渐增加，相应的氮含量也逐渐增加。纳米硬度测试结果显示氮化层的纳米硬度和弹性模量较基材钛明显增加，2mN载荷下测得氮化层的纳米硬度和弹性模量分别在11．5～15GPa和200250GPa之间。Surface nitridation of titanium was induced by pulsed laser irradiation in nitrogen atmosphere. The nitridation layers were characterized by scanning electron microscope （SEM）, X-ray diffraction （XRD） and Raman spectroscopy. XRD results showed that the main phases of the nitridα- tion layers were α-Ti and α-TiN, with a small amount of α-Ti （N）. With the increase of laser average power, δ-TiN and α-Ti（N） content in the nitridation layers increased. Correspondingly, the nitrogen content also increased. The hardness and Young＇s modulus of the nitridation layers were measured by nano-indentation with a load of 2mN and found to be 11.5-15GPa and 200-250GPa, which were much higher than that of titanium.

关 键 词：氮化 钛 脉冲激光 氮化钛 

分 类 号：TG146.23[一般工业技术—材料科学与工程]