Ti过渡层对TiO_2/Ag/TiO_2复合多层膜热稳定性影响研究  

Dependence of TiO_2/Ag/TiO_2 multilayers thermal stability on Ti transition layer

作　　者：王振国[1] 蔡珣[1] 陈秋龙[1] 茅及放[1] 

机构地区：[1]上海交通大学教育部高温材料及高温测试重点实验室,上海200030

出　　处：《功能材料》2006年第2期262-264,共3页Journal of Functional Materials

基　　金：上海市纳米专项基金资助项目(0452nm067)

摘　　要：2～3nm的Ti过渡层有效的提高了TiO2／Ag／TiO2多层膜的热稳定性同时对原始膜层的光学性能影响较小。通过AFM形貌分析表明Ti膜促进了Ag膜的连续性和抗结块性能。XRD分析表明在沉积态Ti层已经发生了氧化形成Ti2O3，从而提高了Ag膜与TiO2的结合力。热处理后促进了Ag（111）取向的发展，因此，Ag膜稳定性得到了提高。A 2～3nm Ti interlayer can improve the TiO2/Ag/TiO2 multilayers thermat stabitity but exert little effect on the optical transmission from near UV to near IR region. The interlayer betters silver films continuity and agglomeration resistance as AFM indicated. Titanium layer has oxidized and formed Ti2O3 as deposited, which increase adhesion energy between silver and titanium dioxide. The transition layer also promotes Ag（111） preferred orientation whose surface energy is much lower after thermal treatment. As a result, the thermal stability of silver films is enhanced.

关 键 词：Ti 过渡层 多层膜 热稳定性 光学性能 

分 类 号：O484.1[理学—固体物理]