MgF_2作为镁离子内扩散LiNbO_3单晶扩散源的研究  

A STUDY OF MgF_2 AS A DIFFUSION SOURCE FOR Mg-ION INDIFFUSION LITHIUM NIOBATE SINGLE CRYSTAL

作　　者：阙文修[1] 姚熹[1] 

机构地区：[1]西安交通大学电子材料研究室

出　　处：《物理学报》1996年第1期80-87,共8页Acta Physica Sinica

基　　金：西安交通大学精细功能电子材料与器件开放研究实验室基金

摘　　要：利用ＭｇＦ_２作为扩散源进行镁离子内扩散ＬｉＮＯ_３单晶基片的研究．经电子探针显微镜分析表明，镁的扩散层镁离子浓度分布具有近似半抛物形和阶跃形分布，并得到镁的激活能为１０４ＫＪ／．Ｘ射线衍射分析发现，当镁离子内扩散超过一定程度时，在镁的扩散层出现具有ＬｉＮｂ_３Ｏ_８的物相结构，并发现该物相结构的出现与ＬｉＮＯ_３体内锂离子的外扩散和扩散表面氟离子的存在有关．由扫描电子显微镜观察到氟离子以ＬｉＦ的形式出现，并随着扩散程度的增大，挥发和脱离开扩散层表面．A study of the Mg-ion indiffusion of lithium niobate single crystal substrate is made byMgF_2 as a diffusion source. By means of electron probe microanalysis, the Mg-ion concentra tion of the Mg diffused layer is obtained, which is approximately a half parabolic and stepprofiles. The activation energy of Mg-ion indiffusion is 104 kJ/mol. It is found by X-raydiffraction analysis that in the Mg diffused layer LiNb_3O_8 compound appears with Mg-ion in diffusion beyond a certain extent. The appearance of LiNb_3O_8 compound is related to the Li ion outdiffusion from the bulk of lithium niobate and existence of a great deal of F-ion at thediffused surface. It is observed by scanning electron microscopy that the F-ion is in the formof LiF and LiF will go away from the surface of the Mg diffused layer with increasing of Mg ion indiffusion degree.

关 键 词：二氟化镁 内扩散 铌酸锂 单晶 

分 类 号：TN204[电子电信—物理电子学]