Y型带反射器的声表面波质量传感器  

New Y type surface acoustic wave mass sensor with reflectors

作　　者：杨莺[1] 朱大中[1] 

机构地区：[1]浙江大学信息与电子工程学系,浙江杭州310027

出　　处：《浙江大学学报（工学版）》2006年第2期207-210,共4页Journal of Zhejiang University：Engineering Science

基　　金：国家自然科学基金资助项目(60176027)

摘　　要：为了有效避免体波和边缘多次回波寄生效应，提出了一种Y型带倾斜反射器的双声路质量传感器．在输出叉指换能器（IDT）和芯片边缘之间加入反射器，有效抑制了由于芯片端面声阻抗不连续造成的声表面波端面反射，并提高了器件的灵敏度．在128°Y-X方向LiNbO3衬底上制作了质量传感器，通过非振荡匹配电路和网络分析仪测试了器件的性能．数据处理采用时频傅立叶变换，加门函数消除附加信号．测试结果表明，反射器对边缘多次反射信号的抑制为2～6dB．器件温度补偿效果显著，质量沉积效应灵敏度可达5．61GHz·cm^2／g，线性度良好．A new Y type dual path surface acoustic wave （SAW） mass sensor with slanting metal array reflectors was developed for suppressing bulk wave and edge reflection. In order to reduce the reflection resulting from the impedance discontinuities at the chip edge and to improve the sensitivity of the sensor, a slanting metal array reflector was inserted between the output interdigital transducer （IDT） and the chip edge. The mass sensor was fabricated on 128°Y-X LiNbO3. The properties of the sensor were tested by means of a match circuit and a network analyzer. With the help of Fourier transform, the undesired signals in the time domain were filtered by the gate function before they go to the frequency domain. The results showed that the chip edge multiple reflection suppression was improved by 2-6 dB by reflectors and that a very low relative temperature coefficient of the sensor was obtained. Mass loading effect sensitivity reached 5.61 GHz·cm^2/g with good linearity.

关 键 词：声表面波传感器 质量沉积效应 倾斜反射器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN65[自动化与计算机技术—控制科学与工程]