基于贝叶斯网络的PECVD故障诊断技术  

Fault Diagnosis of PECVD Device Based on Bayesian Networks

作　　者：赵英伟[1] 路孟喜[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《半导体技术》2006年第3期180-182,193,共4页Semiconductor Technology

摘　　要：提出了贝叶斯网络技术在故障诊断中的一种应用,介绍了基于贝叶斯网络的故障诊断技术的基本概念和原理,分析了故障节点和维修节点之间相互作用的关系。应用GeNIe决策系统软件,以PECVD 淀积台的真空系统为例,讲述了贝叶斯网络在半导体工艺设备故障诊断中的应用。An application of Bayesian networks in the area of equipment fault diagnosis is provided. The basic concepts and principle of fault diagnosis technology based on Bayesian networks are introduced. The mutual effect between fault nodes and test nodes is analyzed. An example of the vacuum system in PECVD is given to show the application of Bayesian networks diagnostics in the semiconductor equipment troubleshooting using GeNie software.

关 键 词：故障诊断 贝叶斯网络 等离子体增强化学汽相淀积 

分 类 号：TN305[电子电信—物理电子学] TN304.055