Experimental study of noncontact ultrasonic motor with non-symmetrical electrode  

作　　者：杨斌 刘景全 陈迪 周伟民 蔡炳初 

机构地区：[1]National Key Laboratory of Nano/Miero Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China

出　　处：《Chinese Physics B》2006年第2期454-459,共6页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China （Grant No 50205017）.

摘　　要：We have proposed a novel noncontact ultrasonic motor based on non-syinmetrical electrode driving. The configuration of this electrode and the fabrication process of rotors are presented. Its vibration characteristics are computed and analysed by using the finite element method and studied experimentally. Good agreement between them is obtained. Moreover, it is also shown that this noncontact ultrasonic motor is operated in antisymmetric radial vibration mode of B21 mode. The maximum revolution speed for three-blade and six-blade rotors are 5100 and 3700r/min at an input voltage of 20V, respectively. Also, the noncontact high-speed revolution of the rotors can be realized by the parts of Ⅰ, Ⅲ of the electrode or Ⅱ, Ⅳ of the electrode. The levitation distance between the s tator and rotor is about 140μm according to the theoretical calculation and the experimental measurement.We have proposed a novel noncontact ultrasonic motor based on non-syinmetrical electrode driving. The configuration of this electrode and the fabrication process of rotors are presented. Its vibration characteristics are computed and analysed by using the finite element method and studied experimentally. Good agreement between them is obtained. Moreover, it is also shown that this noncontact ultrasonic motor is operated in antisymmetric radial vibration mode of B21 mode. The maximum revolution speed for three-blade and six-blade rotors are 5100 and 3700r/min at an input voltage of 20V, respectively. Also, the noncontact high-speed revolution of the rotors can be realized by the parts of Ⅰ, Ⅲ of the electrode or Ⅱ, Ⅳ of the electrode. The levitation distance between the s tator and rotor is about 140μm according to the theoretical calculation and the experimental measurement.

关 键 词：non-symmetrical electrode NONCONTACT travelling wave ultrasonic motor 

分 类 号：O442[理学—电磁学]