一种用于镀制梯度反射率镜的遮蔽挡板的设计  

Mask Designing for Depositing Graded Reflectivity Mirror

作　　者：高晓丹[1] 张晓晖[1] 

机构地区：[1]海军工程大学兵器工程系,湖北武汉430033

出　　处：《激光与红外》2006年第3期199-202,共4页Laser & Infrared

摘　　要：针对所设计的单横模Nd∶YAG激光谐振腔对梯度反射率镜径向膜厚分布的要求,介绍了一种用于镀制梯度反射率镜的遮蔽挡板的设计方法。从常规圆形孔径的遮蔽挡板来分析,比较了采用圆形孔径挡板所得的膜厚分布与设计要求的差别,建立了精确设计遮蔽挡板的数学模型,提出了设计遮蔽挡板的算法,并编程计算出具体的遮蔽挡板的孔径尺寸及安放位置,以获得完全合乎设计要求的变膜厚层沿半径方向的膜厚分布。According to the requirement for film thickness profile along the radius in the graded refleetivity mirror, which is used in the designed single transverse Nd：YAG laser resonator,a designing method for mask is introduced, which is used for depositing graded reflectivity mirror. A special mask with circle aperture is analysed firstly,the film thickness profile by using circle aperture mask and the target profile is compared, and the mathematic model for accurately designing mask is built accordingly. The method for designing mask is put forward, and the aperture size and the position are computed by program. The film thickness profile along the radius of the varying layer is almost the same as the target profile by using it.

关 键 词：梯度反射率镜 遮蔽挡板 径向膜厚分布 激光谐振腔 

分 类 号：O484.4[理学—固体物理]