具有脉宽调制输出的CMOS集成流量传感器  

A CMOS Integrated Flow Sensor with Output Modulated by Pulse-Width

作　　者：黄金彪[1] 童勤义[1] 

机构地区：[1]东南大学微电子中心

出　　处：《Journal of Semiconductors》1990年第5期399-402,共4页半导体学报（英文版）

基　　金：国家自然科学基金

摘　　要：本文介绍一种数字化输出的集成流量传感器,传感器由温敏元件、加热元件和触发器组成,电路连接使得传感器工作在加热和冷却的振荡状态,产生方波输出,其脉冲宽度用作为流速的量度。该传感器由通用的CMOS工艺制成。A CMOS integrated flow sensor with digital output has been introduced. The sensor consistsof a temperature sensing stage, a heating stage and a Schmitt trigger. The circuits are connectedto make the sensor work at the oscillation state of heating and cooling, producing a squarewave output.The pulse width of the square wave is used as a measure of flow velocity. Thesensor is fabricated by the conventional CMOS process.

关 键 词：集成流量 传感器 CMOS 数字化输出 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]