步进闪光压印光刻模具制作工艺研究  

Template Fabrication Process in Step and Flash Imprint Lithography

作　　者：李寒松[1] 丁玉成[1] 卢秉恒[1] 

机构地区：[1]西安交通大学制造系统工程国家重点实验室,西安710049

出　　处：《西安交通大学学报》2006年第3期337-340,共4页Journal of Xi'an Jiaotong University

基　　金：国家重点基础研究发展计划资助项目(2003CB716203);国家自然科学基金资助项目(50275118);国家高技术研究发展计划资助项目(2002AA420050)

摘　　要：由于硅橡胶具有良好的自适应性和优异的脱模性,所以选取硅橡胶作为模具材料,并确定使用硅橡胶加石英硬衬作为压印光刻工艺的模具.分析了硅橡胶模具制作工艺中真空辅助浇铸的成型过程,以及交联固化反应过程的各个工艺参数对硅橡胶模具性能的影响,通过大量实验,具体分析了硅橡胶单体和固化剂配比、浇铸真空压力、固化温度及固化时间等工艺参数,并由此得到了优化的硅橡胶固化工艺参数,提高了硅橡胶模具的物理性能.实验表明,硅橡胶模具具有良好的自清洁功能,其表面图形完好,图形转移效果优异,完全能够满足300 nm特征尺寸图形复型转移压印的要求.A process of fabricating mold applied to step and flash imprint lithography is described. Sili- cone is chosen to serve as the patterning material due to its fine self-adaptability and easy demolding character. The mold is made of the silicone pattern layer with a quartz supporting plate. The parameters in a vacuum casting process and a hardening process for composing the silicone are optimized to improve the physical properties of the mold to keep adequate demold and pattern accuracy. It is experimentally shown that the mold enables to meet the requirements for patterning sub-micrometer structures with satisfied self-cleaning and pattern transferring capacity.

关 键 词：压印光刻 硅橡胶 模具 

分 类 号：TN305.2[电子电信—物理电子学]