一种测量旋转轴线位置的高分辨率光纤传感器  

A High Resolution Fiber Optic Sensor for the Rotation Axis Measurement

作　　者：褚渊[1] 徐峰[1] 陈书剑[1] 丁天怀[1] 

机构地区：[1]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《光电子．激光》2006年第3期306-310,共5页Journal of Optoelectronics·Laser

摘　　要：研制了一种用于旋转轴线位置测量的高分辨率反射型强度调制(RI M)光纤传感器。在旋转部件端面刻划漫反射图谱,利用该图谱对反射光的强度调制,来获取旋转轴线位置偏移的大小和方向。该传感器制作工艺简单,分辨率可以达到0.1μm,灵敏度可以达到100.7mV/μm,在测量范围内具有良好的线性,而且通过调整传感器与反射面间的距离,可以实现对测量范围和灵敏度的调整。给出了旋转轴线位置偏移与反射光强度调制的关系表达式,并利用所建立了实验系统对该传感器的性能进行了分析。A high-resolution reflective intensity modulated （RIM） fiber optic sensor was presented for the rotation axis measurement. A diffuse reflective pattern etched on the end face of the rotator was used to modulate the reflective ptical intensity,on which the quantum and direction of the rotation axis deviation was determined. The sensor has high resolution, 0. 1μm, high sensitivity, 100.7 mV/μm, good linearity in measuring range, and a simple fabrication process. Furthermore, the sensitivity and measuring range was adjustable by changing the reflective distance. The relationship between the deviation of rotation axis and the reflective optical intensity modulation was presented,and a high performance experimental system was also established for the experimental validation.

关 键 词：旋转轴线位置 光纤传感器 强度调制 

分 类 号：TN253[电子电信—物理电子学]