二维CMOS风速计集成控制电路研究  

Study on the Integrated Controlling and Measuring Circuits of the Two-Dimensional CMOS Silicon Wind Sensor

作　　者：吴剑群[1] 秦明[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《电子器件》2006年第1期95-97,101,共4页Chinese Journal of Electron Devices

基　　金：国家自然科学基金资助(60476019);江苏省自然科学基金资助(BK2003052)

摘　　要：一种适用于二维CMOS风速计的集成控制电路,是采用恒温差的控制模式,能同时测量风速和风向。在简单介绍了该风速计的测量原理之后,主要介绍了恒温差控制电路的电路指标,方案选择,并给出了电路结构。通过SPICE模拟并经2所制造和后续的测试,最后给出了流片的静态测试结果。从静态特性看能满足我们的测试要求,并为下一步的动态测试奠定了基础。This paper describes the controlling circuit of a two-dimensional CMOS silicon wind sensor, which exploits CTD controlling mode and can simultaneously measure both the wind velocity and direction. After a brief introduction of the operational principal of the wind sensor, we focus on the target, blue print and structure of the CTD controlling circuit. The circuit is simulated by SPICE and fabricated by No. 24 institute. Finally, the testing results of the circuit are given. From the static state results of the circuit, it shows that the circuit can meet our test demand, and also establish the foundation for the follow steps of dynamic test.

关 键 词：风速计 恒温差控制 CMOS 放大电路 

分 类 号：TN431.1[电子电信—微电子学与固体电子学] TP212.6[自动化与计算机技术—检测技术与自动化装置]