VIBRATION MEASUREMENT OF DOUBLE-ENDED TUNING FORKS RESONATOR  

作　　者：LENG Changlin ZHANG Guoxiong ZHONG Ying JIANG Chengzhi YU Fusheng 

机构地区：[1]State Key Laboratory of PrecisionMeasuring Technology and Instruments, Tianjin University, Tianjin 300072, China [2]Department of Mechatronics,Shandong Institute of Architecture and Engineering, Jinan 250061, China

出　　处：《Chinese Journal of Mechanical Engineering》2006年第1期128-130,共3页中国机械工程学报（英文版）

基　　金：This project is supported by National Natural Science Foundation of China (No.50275108).

摘　　要：To enhance the coherence and reliability of the double-ended tuning fork （DETF） resonator, a measurement system of resonator vibration is presented to check its dynamic characteristics. Laser Doppler techniques are utilized and the relation between DETF vibration velocity and output current of photodetector is obtained. Resonator vibration equation is also analyzed and its driving power only depends on the direct current bias voltage and the amplitude of alternative voltage. Furthermore, a special resonator driving control circuit based on measurement is designed. The amplitude and frequency of circuit is controlled by a computer so that highly stable and strong driving signal can be output. Experiments on driving and measuring double-ended tuning fork have been done, The frequency of driving signal is 8 kHz and the peak-to-peak value of driving voltage is 140 V. Experimental results indicate resonator can be drived stably by driving control circuit and dynamic characteristics of DETF may be measured in real time.To enhance the coherence and reliability of the double-ended tuning fork （DETF） resonator, a measurement system of resonator vibration is presented to check its dynamic characteristics. Laser Doppler techniques are utilized and the relation between DETF vibration velocity and output current of photodetector is obtained. Resonator vibration equation is also analyzed and its driving power only depends on the direct current bias voltage and the amplitude of alternative voltage. Furthermore, a special resonator driving control circuit based on measurement is designed. The amplitude and frequency of circuit is controlled by a computer so that highly stable and strong driving signal can be output. Experiments on driving and measuring double-ended tuning fork have been done, The frequency of driving signal is 8 kHz and the peak-to-peak value of driving voltage is 140 V. Experimental results indicate resonator can be drived stably by driving control circuit and dynamic characteristics of DETF may be measured in real time.

关 键 词：Resonator Optical measurement Tuning fork MEMS Laser doppler 

分 类 号：TN752[电子电信—电路与系统]