用于10Gb/s传输系统的电吸收调制器与分布反馈激光器集成光源  

Electroabsorption-modulated laser light-source module using selective area growth for 10 Gb/s transmission

作　　者：赵谦[1] 潘教青[1] 张靖[1] 李宝霞[1] 周帆[1] 王宝军[1] 王鲁峰[1] 边静[1] 赵玲娟[1] 王圩[1] 

机构地区：[1]中国科学院半导体研究所国家光电子工艺中心,北京100083

出　　处：《物理学报》2006年第3期1259-1263,共5页Acta Physica Sinica

基　　金：国家重点基础研究发展规划(973)项目(批准号:G2000068301);国家高技术研究发展计划(863)项目(批准号:2002AA312150);国家自然科学基金(批准号:90101023;60176023;60476009)资助的课题.~~

摘　　要：采用超低压(22×10~2Pa)选择区域生长(selective area growth,SAG)金属有机化学气相沉积(metal-organic chemicalvapor deposition,MOCVD)技术成功制备了应变型InGaAsP/InGaAsP电吸收调制器(electroabsorption modulator,EAM)与分布反馈激光器(distribute feedbacklaser,DFB)单片集成光源的新型光电器件.实验结果表明,采用该技术制备的集成器件表现出了良好的性能:激射阈值为19mA,出光功率接近7mW,边模抑制比(side-mode suppressionratio,SMSR)大于40dB,将该集成器件出射光耦合进普通单模光纤后进行测量,获得了16dB的消光比,器件3dB响应带宽达到了10GHz以上.将该集成器件完全封装后成功进行了10Gb/s非归零码(non-returnzero,NRZ)的传输实验:在误码率为10^(-10)的传输条件下于普通单模光纤中传输了53.3km,色散代价小于1.5dB,动态消光比大于8dB,且眼图清晰张开.In this work, a novel light source of strained InGaAsP/InGaAsP MQW EAM monolithically integrated with DFB laser is fabricated by ultra-low-pressure （22 × 10^2 Pa） selective area growth （SAG） MOCVD technique. Superior device performances have been obtained, such as low threshold current of 19 mA, output light power of about 7 mW, and over 16 dB extinction ratio at 5 V applied voltage when coupled into a single mode fiber. Over 10 GHz 3 dB bandwidth in EAM part is developed with a driving voltage of 3 V. After the chip is packaged into a 7-pin butterfly compact module, 10-Gb/s NRZ transmission experiments are successfully performed in standard fiber. A clearly-open eye diagram is achieved in the module output with over 8.3 dB dynamic extinction ratio. Power penalty less than 1.5 dB has been obtained after transmission through 53.3 km of standard fiber, which demonstrates that high-speed, low chirp EAM/DFB integrated light source can be obtained by ultra-low-pressure （22 × 10^2Pa） SAG method.

关 键 词：超低压 选择区域生长 集成光电子器件 10 Gb/s 

分 类 号：TN248[电子电信—物理电子学] TN761