新型前栅极CNT-FED的研究  

Study on the Novel Normal-Gate CNT-FED

作　　者：储开荣[1] 狄云松[1] 陈静[1] 杨夏喜[1] 雷威[1] 张晓兵[1] 

机构地区：[1]东南大学电子工程系,江苏南京210018

出　　处：《真空电子技术》2006年第1期12-14,25,共4页Vacuum Electronics

基　　金：国家973计划(No.2003CB314706和No.2003CB314702);教育部博士点基金(编号:20030286003)项目

摘　　要：传统的前栅极场致发射显示板由于介质层和栅极的制作在生成或制作阴极场致发射源之后,在制造过程中容易破坏场致发射源;另外阴极发射对介质层厚度、阳极电压和调制极开口等参数非常敏感,所以器件的发射均匀性难以保证。为了解决这些问题,引入了类似HOP玻璃的结构。阴极上只需要丝印碳纳米管,无需制作介质层和栅极,解决了场致发射源被破坏的问题。阴极与栅极之间真空取代了介质层,由于真空的绝缘性能高于介质层,所以阴极与栅极之间的距离可以减小,栅极的调制效果更显著。由于玻璃的平整度高于一般方法制作的介质层的平整度,所以器件的发射均匀性比较好。The field emission source of traditional normal gate FED can be easily destroyed because of the later fabrication of dielectric layer and gate. Moreover, cathode emission is quite sensitive to structure parameters such as dielectric layer＇ thickness, anode voltage and gate aperture; therefore, it is hard to guarantee the emission uniformity. This paper introduces a structure similar to HOP one to solve the above problems. Carbon nanotube cathodes are formed by screen- printing, and dielectric layer or gate are no longer needed. Therefore, the problem of emission source being destroyed is solved. Vacuum gap between cathode and gate which has a higher insulation replaces dielectric layer, so it can be decreased to get better gate modulation. Because glass is flatter than ordinary dielectric layer, better emission uniformity can be obtained.

关 键 词：场致发射显示板 三极结构 前栅极 碳纳米管 HOP玻璃 

分 类 号：TB873[一般工业技术—摄影技术]