Tribological Properties of DLC Film Prepared by C^+ Ion Beam-assisted Deposition (IBAD)  

作　　者：白秀琴 Peter Bhm 

机构地区：[1]Reliability Engineering Institute,Wuhan University of Technology, Wuhan 430063,China,Wuhan Research Institute of Materials Protection, Wuhan 430030, China [2]IAVF Antriebstechnik,AG 76187 Karlsruhe,Germany

出　　处：《Journal of Wuhan University of Technology(Materials Science)》2006年第1期49-52,共4页武汉理工大学学报（材料科学英文版）

基　　金：Funded by the National Natural Science Foundation of China(No.50175041 ,50275111)

摘　　要：C ^＋ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon （ DLC ） film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nanoindentation , the DLC film has been recognized as hydrogenated DLC film and its tribologicul properties have been evaluated. The bull-on-disc testing results show that the hardness and the tribologicul properties of the DLC film produced by C^ ＋ ion beam- assisted deposition are improved significantly. DLC film produced by C ^＋ ion beam- assisted deposition is positive to have a prosperous tribologicul application in the near future.C ^＋ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon （ DLC ） film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nanoindentation , the DLC film has been recognized as hydrogenated DLC film and its tribologicul properties have been evaluated. The bull-on-disc testing results show that the hardness and the tribologicul properties of the DLC film produced by C^ ＋ ion beam- assisted deposition are improved significantly. DLC film produced by C ^＋ ion beam- assisted deposition is positive to have a prosperous tribologicul application in the near future.

关 键 词：DLC film C ^＋ ion beam- assisted deposition （IBAD） tribological properties 

分 类 号：TG174.44[金属学及工艺—金属表面处理]