超导／半导兼容技术的理论研究  

A Theoretical Study on Super /Semi conductor Compatible Technology

作　　者：刘融[1] 钱文生[1] 魏同立 

机构地区：[1]东南大学微电子中心

出　　处：《微电子学》1996年第5期305-308,共4页Microelectronics

摘　　要：超导器件和电路因其具有超高速度、超低功耗、超低噪声和超高可靠性等卓越性能而受到越来越多的关注。但由于其制造工艺和应用条件均不够成熟，目前尚不能真正进入实用阶段。介绍了超导／半导兼容材料，分析了材料制备中的问题，提出了相应的解决措施。Having high speed,low noise and low power consumption,superconducting devices and circuits perform very well.However,the complicated fabrication process and immature conditions for use prevent them from practical applications.Super /semi conductor compatible materials are introduced.Problems and difficulties in preparing them are discussed,and their solutions are proposed.Also,the theory of super conducting interconnect and semiconductor coupled superconducting field effect transistors are dealt with in detail.

关 键 词：超导体 电子学 电子材料 半导体集成电路 

分 类 号：TN43[电子电信—微电子学与固体电子学] TM26[一般工业技术—材料科学与工程]