切变振动型石英晶体谐振器的特点及其应用  

The Characteristics and Applications of a Shear-vibrating Quartz Crystal Resonator

作　　者：田文杰[1] 路峻岭[2] 刘玲玲[1] 张福学[1] 

机构地区：[1]北京信息工程学院传感技术研究中心,北京100101 [2]清华大学物理系,北京100084

出　　处：《压电与声光》2006年第2期150-152,共3页Piezoelectrics & Acoustooptics

基　　金：总装预研基金项目(0241323030415);北京市教委项目(KM200610772009)

摘　　要：根据石英晶体的压电方程和晶体振动理论,研究了AT-切石英晶体厚度切变振动模式下振动频率与结构参数间的关系,以及石英晶体谐振器在电极区形成稳衡驻波的频率条件及电极区外波的传播特性。试验表明,根据本文研究结果设计的石英晶体谐振器,其力敏特性基本与晶体边缘的固接方式无关,利用这种结构形式的石英谐振器作力敏元件用于姿态检测时,检测分辨率可达0.001°,短期频率稳定性达到1.38×10-10/min。According to piezoelectric equation and vibration theory of quartz crystal, we studied the elastic wave＇s transmission characteristic in a AT-cut thickness-shear-vibration quartz crystal, and the frequency conditions of which quartz crystal resonator formed stationary wave in electrode district. We also discussed the characteristic of wave＇s transmission outside the electrode district. A quartz crystal resonator is developing based on this analysis. The experiment shown that the force-sensing characteristics are dependent of the fixation of the crystal edge. The detecting distinguish ability is up to 0. 001° ,and the short-term frequency stability is up to 1.38 × 10^-10/min.

关 键 词：石英晶体 切变振动 驻波特性 石英谐振器 

分 类 号：O482.41[理学—固体物理] TN752.2[理学—物理]