深亚微米飞高测量的光电检测系统设计  

Design of Optoelectronic Detection System for Deep Sub-micron Flying Height Measuring

作　　者：王亮[1] 李玉和[1] 李庆祥[1] 陈张玮[1] 

机构地区：[1]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《电测与仪表》2006年第3期5-7,19,共4页Electrical Measurement & Instrumentation

基　　金：高等学校博士点专项科研基金资助项目(编号20020003015)

摘　　要：基于光电传感原理,设计了用于深亚微米飞高测量的光电检测系统,采用前置放大和后级放大电路结合,设计高速高精度数据采集系统,介绍了系统控制交互界面。性能测试结果表明,该光电检测系统线性度、分辨率和动态频率均满足飞高动态测试的要求。Based on the optoelectronic sense principle,a set of optoelectronic detection system for deep sub-micron flying height measuring is designed, which focuses on the preamplifier and post amplifier. It is a high-speed and high-precision data acquisition system, and the system control interactive interface is introduced. Analysis and experi- ment show that this system has proper parameters on linearity of optoelectronic detection system, measuring resolution and dynamic frequency, and can realize dynamic measuring for the deep sub-micron flying height.

关 键 词：高测量 近场光存储 光电检测 微弱信号 

分 类 号：TN247[电子电信—物理电子学]