基于微电机械系统的反射式可变光衰减器的研究与设计  

The Research and Design of MEMS-based Reflected Variable Optical Attenuator

作　　者：施向华[1] 邱怡申[1] 李高明[1] 徐惠真[1] 

机构地区：[1]福建师范大学物理与光电信息科技学院,福建福州350007

出　　处：《福建师范大学学报（自然科学版）》2006年第2期46-48,共3页Journal of Fujian Normal University：Natural Science Edition

摘　　要：利用双光纤准直器研制出一种基于微电机械系统(M icro E lectron ic M echan ica l System,M EM S)技术的连续可调光衰减器,利用双光纤准直器光纤头(P igta il)的楔角面对C-L ens准直透镜产生的色散进行了补偿,使得该衰减器工作在C-B and及衰减范围内具有极低的波长相关损耗(W ave lengthD ependen t Loss,W DL)值.分析了影响该衰减器的其它光学性能的各个因素.对所试制样品进行测试结果表明:该衰减器具有良好的光学性能,插损(Insertion Loss,IL),回损(R eturn Loss,RL)等指标达到理想的结果,特别是W DL指标性能优于同类产品.A MEMS-Based reflected continuously adjustable Variable Optical Attenuator is fabri- cated by using the dualfiber collimator. The chromatic dispersion is compensated by using adjusting the pigtailed wedge, which make this type of VOA achieve perfect WDL （Wavelength Dependent Loss） when working in C-Band and within 20 dB attenuation. The factors which affecting the other optical performance are also analyzed. The testing results on samples show this VOA have good peroformanc, Insertion Loss, Return Loss, Especially the Wavelength Dependent Loss is better than similar products made by others.

关 键 词：微电机械系统 双光纤准直器 波长相关损耗 可变光衰减器 

分 类 号：TN913.7[电子电信—通信与信息系统]