反应室沉积TiN／AlN复相陶瓷的研究  

Study on Composite Ceramics TiN/AIN Depositing in Chamber

作　　者：邹东利[1] 阎殿然[1] 郭亚昆[1] 刘英凯[1] 卢国起[1] 

机构地区：[1]河北工业大学材料学院,天津300132

出　　处：《热加工工艺》2006年第7期13-14,18,共3页Hot Working Technology

摘　　要：采用自蔓延高温合成与等离子喷涂相结合的方法在自制的反应室中沉积了TiN／AlN复相陶瓷。通过 XRD、SEM、TEM等手段对复相陶瓷进行了相分析、表面形貌及微观结构分析,结果表明,复相陶瓷主要由TiN和 AlN两相组成,但复相陶瓷粒子间的结合较差,没有明显的相界,TEM表明复相陶瓷有类似于羽毛状的形貌。The composite ceramics TiN/AlN was deposited with self-propagating high-temperature synthesis combine and plasma spraying in the self-manufacturing chamber, The structure,surface morphology,microstmcture of composite ceramics were analyzed through XRD、SEM、TEM.The results show that the composite ceramics is made up of TiN and AlN,but integrating between grains of the composite ceramics is not good,without evident boundary,TEM shows that morphology of the composite ceramics resembles the shape of the feather.

关 键 词：等离子喷涂 自蔓延高温合成 TiN/AlN 复相陶瓷 

分 类 号：TG174.442[金属学及工艺—金属表面处理]