零相位法石英晶片测试仪设计与实现  

Design and Implementation of the Quartz Wafer Measuring Instrument by Zero Phase Technique

作　　者：王华军[1] 李东[1] 王艳林[1] 

机构地区：[1]北京机械工业学院电子信息工程系,北京市100085

出　　处：《仪器仪表标准化与计量》2006年第2期29-31,共3页Instrument Standardization & Metrology

基　　金：(机电系统测控)北京市重点实验室开放项目资助

摘　　要：介绍零相位法石英晶片测试仪的设计。仪器由微控制器、复杂可编程逻辑器件、信号发生器、滤波器、π网络电路、幅度相位检测、数码显示和键盘控制等部分组成。仪器可在1MHz～60MHz范围内测试石英晶片的谐振频率、谐振电阻,具有测试方法符合国际标准、精度高、可检出寄生频率等特点,总体性能优于国内应用的其它石英晶片测试仪器。The design of quartz wafer measuring instrument is introduced. The instrument consists of a microcontroller, a complex programmable logic device, a digital signal synthesizer, a filter, a π-network, a gain and phase detector, LEDs and a keyboard. The instrument can measure the resonance frequency and equivalent series resistance of the wafer with frequency range from 1MHz to 60MHz. It conformed to the international quartz wafer measuring standard, and its precise is higher, and it has the ability of measuring stray frequency. Besides, its performance is superior to other domestic similar instruments on aspect of measuring precise.

关 键 词：测试 Π网络 石英晶片 谐振频率 

分 类 号：TH873[机械工程—仪器科学与技术]