短腔长单模量子级联激光器  

Single Mode Operation of Short-Cavity Quantum Cascade Lasers

作　　者：刘峰奇[1] 郭瑜[1] 李路[1] 邵晔[1] 刘俊岐[1] 路秀真[1] 王占国[1] 

机构地区：[1]中国科学院半导体研究所半导体材料科学重点实验室,北京100083

出　　处：《Journal of Semiconductors》2006年第4期679-682,共4页半导体学报（英文版）

基　　金：国家杰出青年科学基金(批准号:60525406);国家自然科学基金重点项目(批准号:60136010);国家重点基础研究发展计划(批准号:G200006832);国家高技术研究发展计划(批准号:2001AA311140,2005AA31G040)资助项目~~

摘　　要：报道了激射波长为5.4和7.84μm的应变补偿In1-xGaxAs/In1-yAlyAs量子级联激光器的单模激射.以高质量的应变补偿量子级联激光器材料为支撑,通过减小FP腔长,开辟实现单模器件的新途径.首次实现阈值电流仅为50mA、腔长为145μm的激射波长在λ≈5.4μm的单模激射和阈值电流仅为80mA、腔长为170μm的激射波长在λ≈7.84μm的单模激射.这是目前InGaAs/InAlAs材料体系最短腔长的边发射量子级联激光器.Single mode operation of strain-compensated In1-xGaxAs/In1-yAlyAs quantum cascade lasers emitting at λ≈5.4 and 8μm is realized by shortening the Fabry-Perot cavity length. Accurate control of growth parameters and strain balance results in a perfect lattice match and thus in excellent material quality. Single mode emission with a side mode suppression ratio greater than 20dB for uncoated lasers is realized. Record low threshold currents of 50 and 80mA and record short cavity lengths of 145 and 170μm are achieved for λ≈5.4μm and λ≈7.84μm devices, respectively, in pulsed mode.

关 键 词：应变补偿量子级联激光器 短腔长 单模激射 

分 类 号：TN248[电子电信—物理电子学]